EyeVision Machine Vision software has developed a program for wafer particle inspection, especially for the semiconductor industry.
Particles are probably the most common defects in wafer production. During transport, during processing, or even in the plant itself, particles such as dust or material abrasion can settle on the wafer. This can develop into an undesirable covering and alter the processing in this area.
The particles can prevent the etching or the precipitation of layers. This can lead to malfunctions such as short-circuits or missing electrical joints between conductors. The particle inspector of EVT software analyzes the surface of the wafer for dust and other particles, using a laser line.
EyeVision software recognizes even the slightest discrepancy and can send an evaluation of the wafer as Good or Bad. EyeVision software is very easy-to-handle and the particle inspection module can be adjusted easily in the graphical user interface.